Computer Science > Other Computer Science
[Submitted on 7 May 2008]
Title:Sub-$μ$ structured Lotus Surfaces Manufacturing
View PDFAbstract: Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 micrometers high.
Submission history
From: EDA Publishing Association [view email] [via CCSD proxy][v1] Wed, 7 May 2008 08:39:11 UTC (998 KB)
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