"Piezoelectric MEMS devices and its application as bio-chemical sensors."

Jian Lu et al. (2013)

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DOI: 10.1109/NEMS.2013.6559705

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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  - conf/nems/LuSZTWIM13
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Jian Lu, Takahisa Sagawa, Lulu Zhang, Hideki Takagi, Dong F. Wang, Toshihiro Itoh, Ryutaro Maeda:
Piezoelectric MEMS devices and its application as bio-chemical sensors. NEMS 2013: 163-166

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