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"MEMS inclinometer based on a novel piezoresistor structure."
Lijun Tang et al. (2009)
- Lijun Tang, Kairui Zhang, Shang Chen, Guojun Zhang, Guowen Liu:
MEMS inclinometer based on a novel piezoresistor structure. Microelectron. J. 40(1): 78-82 (2009)
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