"12.2 A 7nm FinFET SRAM macro using EUV lithography for peripheral repair ..."

Taejoong Song et al. (2017)

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DOI: 10.1109/ISSCC.2017.7870334

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Taejoong Song, Hoonki Kim, Woojin Rim, Yongho Kim, Sunghyun Park, Changnam Park, Minsun Hong, Giyong Yang, Jeongho Do, Jinyoung Lim, Seungyoung Lee, Ingyum Kim, Sanghoon Baek, Jonghoon Jung, Daewon Ha, Hyungsoon Jang, Taejung Lee, Chul-Hong Park, Bongjae Kwon, Hyuntaek Jung, Sungwee Cho, Yongjae Choo, Jaeseung Choi:
12.2 A 7nm FinFET SRAM macro using EUV lithography for peripheral repair analysis. ISSCC 2017: 208-209

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