"A micromachined gyroscope with an effective stress-released frame."

Yu Xin et al. (2013)

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DOI: 10.1109/NEMS.2013.6559889

access: closed

type: Conference or Workshop Paper

metadata version: 2018-07-09

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  dblp key:
  - conf/nems/XinWXHHC13
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Yu Xin, Xuezhong Wu, Dingbang Xiao, Zhanqiang Hou, Kun He, Zhihua Chen:
A micromachined gyroscope with an effective stress-released frame. NEMS 2013: 994-997

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