Carbon nanotube integration with a CMOS process

MS Perez, B Lerner, DE Resasco, PD Pareja Obregon… - Sensors, 2010 - mdpi.com
MS Perez, B Lerner, DE Resasco, PD Pareja Obregon, PM Julian, PS Mandolesi, FA Buffa
Sensors, 2010mdpi.com
This work shows the integration of a sensor based on carbon nanotubes using CMOS
technology. A chip sensor (CS) was designed and manufactured using a 0.30 μm CMOS
process, leaving a free window on the passivation layer that allowed the deposition of
SWCNTs over the electrodes. We successfully investigated with the CS the effect of humidity
and temperature on the electrical transport properties of SWCNTs. The possibility of a large
scale integration of SWCNTs with CMOS process opens a new route in the design of more …
This work shows the integration of a sensor based on carbon nanotubes using CMOS technology. A chip sensor (CS) was designed and manufactured using a 0.30 μm CMOS process, leaving a free window on the passivation layer that allowed the deposition of SWCNTs over the electrodes. We successfully investigated with the CS the effect of humidity and temperature on the electrical transport properties of SWCNTs. The possibility of a large scale integration of SWCNTs with CMOS process opens a new route in the design of more efficient, low cost sensors with high reproducibility in their manufacture.
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