Arrangement for monitoring an optical element, laser source and euv radiation generation apparatus (Q126490139)

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US patent 11322902
Language Label Description Also known as
English
Arrangement for monitoring an optical element, laser source and euv radiation generation apparatus
US patent 11322902

    Statements

    title
    Arrangement for monitoring an optical element, laser source and euv radiation generation apparatus (English)
    0 references
    owned by
    Trumpf
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    author name string
    Joachim Schulz (Gerlingen)
    series ordinal
    1
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    Marc Weber (Ravensburg)
    series ordinal
    2
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    Matthias Schmitt (Leonberg)
    series ordinal
    3
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    significant event
    filing
    point in time
    21 July 2021
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    consent
    point in time
    3 May 2022
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    Identifiers

    patent number
    US11322902
    0 references
     
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