http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AT-251651-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-5361 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0475 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-53 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-04 |
| filingDate | 1965-02-23^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1967-01-10^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1967-01-10^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | AT-251651-B |
| titleOfInvention | Process for etching silicon carbide |
| priorityDate | 1964-03-06^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549006 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9863 |
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