| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_955d6db023dd75f349b401837299f489 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32256 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
1988-06-03^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1991-07-16^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3fe69cda182365bfe4ce2d1a6b051443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18586296154829b7e9e2f5016ce0ea16 |
| publicationDate |
1991-07-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CA-1286427-C |
| titleOfInvention |
Microwave plasma generator |
| abstract |
For: Microwave Plasma Generator ABSTRACT OF DISCLOSURE A microwave plasma generator for producing an axisymmetric plasma, having a waveguide apparatus, means for introducing a microwave source into the waveguide apparatus, and means for generating a circular axisymmetric microwave field from the microwave source. There are means for tuning the field to match the impedance of a plasma load. Further included is a vacuum chamber for containing a gas to be ionized to form the plasma, means for introducing this gas into the vacuum chamber, and means for coupling the microwave field to the vacuum chamber to form the plasma. |
| priorityDate |
1987-06-22^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |