http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CA-2749724-C
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d6c7abd1665a53282a4bcbc630cc7e70 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00078 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J15-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-035 |
| filingDate | 2009-10-09^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-11-08^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbafb3f05b3cd6a503191ee00b8df2f7 |
| publicationDate | 2016-11-08^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CA-2749724-C |
| titleOfInvention | Reactor for producing polycrystalline silicon using the monosilane process |
| abstract | A reactor (10) is disclosed for producing polycrystalline silicon, which reactor is provided with a reactor base plate (2) which has a multiplicity of nozzles (4) formed therein. A silicon-containing gas flows through the nozzles (4) . A plurality of filament rods (6) are likewise mounted on the reactor base plate (2). In addition, a gas outlet opening (8) for feeding used silicon-containing gas to an enrichment and/or treatment stage is provided. The gas outlet opening (8) is formed at a free end (21) of an inner tube (20), wherein the inner tube (20) is conducted through the reactor base plate (2). |
| priorityDate | 2009-01-22^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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