http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CA-959388-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dad81fcefa54e8466a99b46e63c5cf9f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| filingDate | 1972-06-08^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1974-12-17^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e47232e21bd89a1803cdfb16560e8f3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_983008b7faa2fec519d2bc493942729b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d4213d88f29cb94581962e0475aea4e |
| publicationDate | 1974-12-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CA-959388-A |
| titleOfInvention | Silicon nitride-silicon oxide etchant |
| priorityDate | 1971-07-19^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
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