http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101103135-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81cfb88d909c75104c0c8d61799a72b0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0391 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0338 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B67D99-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4485 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B67D99-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C7-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-38 |
| filingDate | 2005-11-23^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-01-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-101103135-A |
| titleOfInvention | Pentaborane(9) storage and delivery |
| abstract | A fluid storage and dispensing system (100) comprising a vessel (126) in a liquid nitrogen bath (128) for holding a pentaborane(9)-containing fluid at subatmospheric pressure. The pentaborane may be supplied from liquid or synthesis source (124), nitrogen from valve (120), which are controlled by gas regulators (R-I & R-2). The fluid storage and dispensing system may be communicatively connected via various valves (AV-I to AV- 16 & MV-I to MV-4) to a semiconductor or liquid crystal manufacturing facility, whereby the pentaborane(9) is used as a substitute for commercially available boron hydride compounds, such as diborane. The system may include the exhaust pump (130), scrubbing means (140), and three-way valve (162) to sample the concentration of pentaborane(9) output therefrom. |
| priorityDate | 2004-11-29^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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