http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102779715-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02T50-60 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-466 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2012-05-08^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-09-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-09-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102779715-B |
| titleOfInvention | Plasma generation electrode and plasma processing apparatus |
| abstract | The present invention relates to plasma generation electrode and plasma processing apparatus.The invention provides a kind of plasma generation electrode being difficult to produce paradoxical discharge, granular problem when carrying out plasma treatment to FPD substrate.Plasma generation electrode (20) possesses: main body, there is the opposed faces (F) relative with the flat panel display substrate (G) be configured in chamber (2), anodized is carried out to the surface of the base material be made up of aluminum or aluminum alloy (20a) and there is anodic oxidation coating (20b); Multiple gas squit hole (22), forms at opposed faces (F) opening of main body; Pottery sprayed (23), is at least formed in the peristome (22c) of the gas squit hole (22) of opposed faces (F).At opposed faces (F), the part between pottery sprayed (23) exposes the face of main body. |
| priorityDate | 2011-05-10^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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