| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2d32a1324eb3a240649ffee8d475d63 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S134-902 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B17-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B11-00 |
| filingDate |
2011-11-15^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-07-15^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37660544ea1c79c0f38175e0fd59f9c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb0fba44a4653e254027e222c54b1355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a8797a8b714f8abeb43fac3e351e0d1 |
| publicationDate |
2015-07-15^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-103008309-B |
| titleOfInvention |
Wafer scrubber and wafer scrub method |
| abstract |
A wafer scrubber is disclosed, including a chamber, and a holder connecting to a spindle disposed in the chamber, wherein the holder supports a wafer, and the wafer spins to remove water on the wafer, and a mashed inner cup comprising a plurality of through holes disposed between the holder and a wall of the chamber, wherein the mashed inner cup receives water from a surface of the wafer and rotates around the spindle to release the water through the through holes. |
| priorityDate |
2011-09-23^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |