| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60480587582bf8e0ca64c6076c0646ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-1534
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-057 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3056 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-46 |
| filingDate |
2012-11-08^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a951b63dbb226d779c4fab0ee4edc830
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09dbf6f911d48fcda7858c4259ad8fca |
| publicationDate |
2013-05-08^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-103094053-A |
| titleOfInvention |
Charged particle energy filter |
| abstract |
A multi-element electrostatic chicane energy filter (300) , with the addition of electrostatic quadrupole and hexapole excitations to the dipole elements (302, 304, 306, 308). A charged particle energy filter according to the present invention with a combination of dipole, quadrupole, and hexapole elements capable of producing a line focus at an aperture (310) reduces space-charge effects and aperture damage. A preferred embodiment allows the filter to act as a conjugate blanking system. The energy filter is capable of narrowing the energy spread to result in a smaller beam. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114158175-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114158175-A |
| priorityDate |
2011-11-08^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |