http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105977259-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7883 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-76 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11519 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-788 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11521 |
| filingDate | 2016-07-27^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-01-18^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-01-18^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105977259-B |
| titleOfInvention | Layout, mask and manufacturing method of split-gate flash memory |
| abstract | The present invention provides a layout, a mask and a manufacturing method of a split-gate flash memory. The technical scheme of the present invention combines the two layers of the floating gate layer in the prior art into one layer, and the area corresponding to the word line strip is merged into one layer. The size of the floating gate layout is increased, and the corresponding layout design, the floating gate mask and the word line contact hole mask are obtained, so that in the manufacturing method of the split-gate flash memory of the present invention, it is possible to pass a single step of light. The floating gate region is defined under the etching process, and the aspect ratio of the etching opening of the floating gate dielectric layer in the corresponding region is reduced, and the problem of excessive polymer residue caused by the high aspect ratio of the etching opening is avoided. The process steps are greatly simplified and the manufacturing cost is reduced. |
| priorityDate | 2016-07-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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