http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106340451-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2605 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-0047 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-26 |
| filingDate | 2016-07-06^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-01-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-01-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106340451-B |
| titleOfInvention | Heat treatment method and heat treatment apparatus |
| abstract | The invention provides a heat treatment method and a heat treatment apparatus capable of omitting simulation operation. A lower surface of a semiconductor wafer (W) held by a holder (74) in a chamber (6) is irradiated with light from a Halogen Lamp (HL) and preheated, and then an upper surface of the semiconductor wafer (W) is irradiated with flash light from a Flash Lamp (FL) and flash heating is performed. Before starting a heat treatment of a first semiconductor wafer (W) in a batch, a high-temperature process gas heated by a heater (22) is supplied into a chamber (6), thereby preheating an in-chamber structure including a pedestal (74). The temperature of the structure in the chamber is raised to the same level as that in the normal process, so that all the semiconductor wafers (W) constituting one batch can be supported by the same temperature support (74) even if the simulation operation is not performed, and the temperature history can be made uniform. |
| priorityDate | 2015-07-06^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5416 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419569951 |
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