http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106373870-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02458 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0254 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02656 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate | 2016-11-24^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-06-02^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-06-02^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106373870-B |
| titleOfInvention | Semiconductor structure and preparation method |
| abstract | The invention discloses a semiconductor structure and a preparation method thereof. The method comprises the following steps: (1) forming a nitride transition layer and a nitride semiconductor layer in order on an upper surface of a substrate so as to obtain a first complex; (2) performing ion implantation treatment on the first complex, wherein the implanted ions contain hydrogen ions; (3) subjecting the first composite body to a bonding process with a substrate having an insulating layer on an upper surface thereof, in which the insulating layer is in contact with the nitride semiconductor layer, so as to obtain a second composite body; and (4) subjecting the second composite to a lift-off process so as to obtain a third composite and the semiconductor structure, respectively, wherein the nitride semiconductor layer is formed of a nitride semiconductor material containing Al. The method has simple operation steps and lower requirements on instruments and equipment, and can avoid the limitation on the size of a semiconductor structure caused by the undersize of the wafer when the aluminum nitride wafer is used for preparation. |
| priorityDate | 2016-11-24^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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