http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106415776-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3222 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32229 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3211 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2015-05-28^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-03-08^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-03-08^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106415776-B |
| titleOfInvention | Integrated form induction coil and microwave antenna as whole plane source |
| abstract | This disclosure relates to a kind of plasma process system, which can generate inductively coupled plasma (ICP) and surface wave plasma using same physical hardware using single power source component.Power source component may include antenna plate, and antenna plate may include the conductive material for being used as ICP coil for radio frequency (RF) power source and being used as slot antenna for microwave source. |
| priorityDate | 2014-05-28^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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