http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106458569-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-042 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00658 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0833 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 |
| filingDate | 2015-05-29^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa38a158a4a13094fda16d21699b2bc4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8de2cd11183c1af0c70c1c34ee72eca0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b873abe11711f42f21961bc72e284c10 |
| publicationDate | 2017-02-22^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106458569-A |
| titleOfInvention | Micromirror arrangement and method for producing same |
| abstract | The invention discloses a micromirror arrangement and a method for producing the same. The micromirror arrangement comprises a mirror membrane; at least one first carrier element; a first coupling element for each first carrier element, said coupling element being arranged between the mirror membrane and the respective first carrier element and being designed to mechanically couple the respective first carrier element to the mirror membrane; at least one second carrier element, which is mechanically coupled to the at least one first carrier element; and a second coupling element for each second carrier element, which is designed to be brought into mechanical contact. The invention further relates to a method for producing a micromirror arrangement according to the invention. |
| priorityDate | 2014-06-17^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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