http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106711035-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02107 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3247 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0657 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0475 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1608 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-0058 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B28D5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 |
| filingDate | 2015-12-07^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-07-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-07-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106711035-B |
| titleOfInvention | Groove structure on silicon carbide substrate with and preparation method thereof |
| abstract | A kind of groove structure and preparation method thereof on silicon carbide substrate; production method includes to be sequentially provided silicon carbide substrate; protective layer is formed on silicon carbide substrate; barrier layer is formed on protective layer; patterned barrier layer, protective layer are rigid mask pattern silicon carbide substrate to form groove using patterned barrier layer, remove patterned barrier layer to form opening; high-temperature tempering process is carried out to form the channel bottom of arc-shaped, and removes protective layer. |
| priorityDate | 2015-11-12^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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