| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45561
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B38-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17D1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-042 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 |
| filingDate |
2015-10-16^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee1ac460c125b7c08f5a5f7c22a6d517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c05101aa2c6b50af2a1dc3c6b4467a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22095c8b1d279d3d0116ca8b872a286f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b2daf024f2cb40cd864cedcac93112b |
| publicationDate |
2017-08-18^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-107075670-A |
| titleOfInvention |
Monolithic gas distribution manifold with various construction techniques and their use cases |
| abstract |
Provided herein is a gas delivery substrate for mounting a gas supply component of a gas delivery system for a semiconductor processing apparatus. The substrate may include multiple layers having major surfaces bonded together to form an external gas supply component for receiving and mounting a first gas supply component, a second gas supply component, a third gas supply component, and a fourth gas supply component. Laminate with openings on major surfaces. The substrate may include a first gas channel extending through an interior major surface that at least partially overlaps a second gas channel extending through a different inner major surface. The substrate may include a first gas conduit comprising a first gas channel connecting the first gas supply to the second gas supply and a second gas conduit comprising a third gas supply to the second gas supply. The second channel of the fourth gas supply part. Various techniques for fabricating gas delivery substrates are also disclosed. |
| priorityDate |
2014-10-17^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |