| abstract |
The present invention relates to a scanning mirror device and a manufacturing method thereof, and relates to an optical device formed by a mirror sheet, a cover sheet and a glass sheet. The mirror sheet includes a first layer of conductive material, a second layer of conductive material, and a third layer of electrically insulating material positioned between the first layer and the second layer. The mirror element is formed from a second layer of mirror sheets and has a reflective surface in the bottom of the cavity open to at least the first layer. When the mirror sheet, the cover sheet and the glass sheet are bonded to each other, the mirror elements can be surrounded by a flat glass sheet of good optical quality. |