| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-507
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67383
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67389
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32926
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32724
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3299
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4586
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2017-06-30^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_959adb46ad26d4af6eea906f436ca927
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a78c58d1816297f097315f197a16ac8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d02ea9d2fad186d691185fb2dc38685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efd849fad5359f6782b1bff1071e10dd |
| publicationDate |
2018-01-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-107564789-A |
| titleOfInvention |
Systems and methods for RF power based substrate support feed-forward temperature control |
| abstract |
The present invention relates to systems and methods for RF power based substrate support feed-forward temperature control. A temperature controller is provided that includes an interface, a compensation controller, a summer, and a second controller. The interface receives the bias power signal and the plasma signal. The bias power signal indicates the bias RF power level of the RF generator. The plasma signal is indicative of the plasma RF power level of the other RF generator. Another interface receives a temperature signal indicative of the temperature of the substrate support. A compensation controller generates a compensation value based on the bias feedforward transfer function and the bias RF power level, and generates another compensation value based on the plasma feedforward transfer function and the plasma RF power level. A summer generates an error signal based on the set point and temperature. The second controller generates a control signal based on the error signal. Another summer controls the actuators to regulate the temperature based on the compensation value and the control signal. |
| priorityDate |
2016-07-01^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |