| abstract |
The invention provides a laminate and a pattern forming method. Provided are a laminate capable of forming a pattern having an excellent opening shape even when a chemically amplified negative resist material is used, and a pattern forming method using the laminate. The laminate includes a chemically amplified negative resist layer and an alkali resin coating layer thereon containing 0.001 to 10 wt% of an alkali compound having a molecular weight of at most 10,000. |