http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108644611-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_64e458e004d930474422807db4558a13 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17D1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B9-0321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K1-126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17D3-01 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17D1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17D3-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K1-12 |
| filingDate | 2018-05-31^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d128a96e0de44095d0638d22a76363e |
| publicationDate | 2018-10-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108644611-A |
| titleOfInvention | A kind of Pulse anti-blow device for high purity silane gas supply |
| abstract | The invention discloses a kind of Pulse anti-blow devices for high purity silane gas supply comprising air source, supply air line, scavenging pipeline and pulse backblowing pipeline；Pulse backblowing pipeline, including it is sequentially connected blowback head and the 4th shut-off valve, the 4th shut-off valve connects pressure regulator valve front end；Blowback head includes shell, and shell is in infundibulate, and the end of infundibulate big end is fluted, chuck for installing in groove, while infundibulate big end installs end cap, and end cap blocks chuck and plays position-limiting action, and end cap is equipped with outlet and is used as the second connector；Chuck hub is provided with centre bore, and centre bore installs valve rod；Infundibulate small end is the first connector for connecting compressed gas；Enclosure interior has protrusion；Valve stem tip has stem head, valve rod to be equipped with spring, and stem head withstands protrusion and is truncated into two spaces inside housings under the action of the spring.The invention has the advantages that pulse backblowing prevents the destruction of silicon dioxide powder foot couple pipe valve. |
| priorityDate | 2018-05-31^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
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