| Predicate |
Object |
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| classificationCPCInventive |
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| classificationIPCInventive |
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B22F3-04
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| filingDate |
2019-08-09^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b18d43ed71aeeb31856e7d6eb0593db
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| publicationDate |
2019-11-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-110467462-A |
| titleOfInvention |
A kind of high-density low-resistance niobium oxide rotating target and preparation method thereof |
| abstract |
A high-density low-resistance niobium oxide rotating target and a preparation method thereof. The target has a density of ≥4.5g/cm 3 , a resistivity of ≤1.4× 10-3 Ω·cm, a length of ≥400mm, and a wall thickness of 6-14mm. The preparation method includes the following steps: 1) powder mixing: mechanically mixing niobium oxide powder and metal niobium powder uniformly; 2) powder pre-sintering: vacuum pre-sintering the mixed powder in step 1); 3) powder treatment: pre-heating Burning powder for ball milling; 4) Cold isostatic pressing: Loading the processed powder into a mold by cold isostatic pressing to form a rotating target blank; 5) Blank turning: Turning the target blank; 6) Vacuum hot pressing sintering: place the processed blank into a graphite mold for hot pressing and vacuum sintering; 7) Target blank processing: Process the sintered rotating target blank according to the size to obtain a high-density and low-resistance rotating niobium oxide target. . The target has good electrical conductivity, good physical and chemical properties, and effectively improves the quality of the target product. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111606708-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110983265-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110983265-A |
| priorityDate |
2019-08-09^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |