http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110662339-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32247 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-4645 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67242 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2019-03-04^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-07-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-07-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-110662339-B |
| titleOfInvention | Plasma source, excitation system for exciting plasma and optical monitoring system |
| abstract | The invention provides a plasma source and an excitation system for exciting a plasma, and an optical monitoring system. In one embodiment, the plasma source comprises: (1) a coaxial resonator body having an inner length and including a first end, a second end, an inner electrode, and an outer electrode, (2) a radio frequency signal interface electrically coupled to the inner electrode and the outer electrode at a fixed position along the inner length and configured to provide a radio frequency signal to the coaxial resonator body, (3) a window positioned at the first end of the coaxial resonator body, and (4) a mounting flange positioned proximate the window at the first end of the coaxial resonator body and defining a plasma cavity, wherein the window forms one side of the plasma cavity and isolates the coaxial resonator body from a plasma in the plasma cavity. |
| priorityDate | 2018-06-28^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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