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filingDate 2019-07-04^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6871b5819987a2a0598c92038b2616c
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publicationDate 2020-01-14^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-110683856-A
titleOfInvention Conductive porous ceramic substrate and method for producing the same
abstract The present invention relates to a conductive porous ceramic substrate and a method for producing the same, and more particularly, to a porous ceramic substrate that is not used as a suction cup or a stage for fixing thin semiconductor wafer substrates or display substrates by vacuum suction, or the like. A conductive porous ceramic substrate which generates static electricity and adds an antistatic function, and a method for producing the same.
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priorityDate 2018-07-05^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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