http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110895733-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P90-30 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06Q10-06316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06Q10-0633 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06Q50-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06Q50-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06Q10-06 |
| filingDate | 2018-09-12^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-04-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-04-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-110895733-B |
| titleOfInvention | Production scheduling method and device, semiconductor processing equipment and storage medium |
| abstract | The invention discloses a production scheduling method and device, semiconductor processing equipment and a storage medium. The method comprises the following steps: s110, receiving a plurality of process tasks input by a user: s120, calculating a scheduling sequence of the current process task; s130, executing a scheduling sequence of the current process task; s140, judging whether silicon chips do not start to execute the scheduling sequence in the current process task, if so, returning to execute S130, and if not, executing S150; s150, calculating a scheduling sequence of the next process task based on the scheduling sequence of the current process task; and S160, continuing to execute the scheduling sequence of the current process task and simultaneously executing the scheduling sequence of the next process task. In the process of executing the task, the scheduling operation can be simplified, and the smooth scheduling execution of the platform is ensured. The utilization rate of the process chamber can be effectively improved, and the process capacity is improved. |
| priorityDate | 2018-09-12^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
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