| abstract |
The invention relates to a spray type gas inlet CVD vertical spray device, which comprises a spray pipe and a spray head, wherein the lower end part of the spray pipe is fixed with the spray head, the middle section of the spray pipe is a preheating zone with a spiral pipe structure, and a bottom plate of the spray head is provided with spray holes. After the device is installed and used, the gas is fully preheated, and the gas-phase carbon source is fully preheated in the spraying device vertically, so that the reaction is more full. The gas source sprays and jets out, has a burst pressure when making gaseous phase carbon source act on the basement, and pressure can be adjusted through adjusting spray time and jet pressure, makes the better reaction of two-dimensional material. |