| abstract |
The invention relates to the technical field of purification of water and oxygen content in machine tools, in particular to a method for cyclic purification of water and oxygen content in an ultra-precision machine tool processing area, which is used to solve the problem that the prior art cannot purify water in the circulating gas in the ultra-precision machine tool processing area content and oxygen content. The present invention includes a pretreatment unit, a purification unit and a circulation control unit, the circulation control unit is connected with the processing area of the ultra-precision machine tool through a gas pipe; the pretreatment unit is used for pre-filtering and processing the circulating gas flowing out of the processing area of the ultra-precision machine tool; The purification unit is used for removing oxygen content and water content in the circulating gas after passing through the pretreatment unit. In the present invention, after the gas in the processing area of the ultra-precision machine tool passes through the pretreatment unit, the purification unit and the circulation control unit, the oxygen content and water content in the circulating gas can be removed, so that the water content in the processing area of the ultra-precision machine tool can be controlled stably and reliably and oxygen content. |