http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113215654-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-36 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-00 |
| filingDate | 2021-04-30^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-04-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-04-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-113215654-B |
| titleOfInvention | Reactor assembly for preparing crystal by PVT method and use method and application thereof |
| abstract | The application discloses a reactor assembly for preparing crystals by a PVT method, and belongs to the field of semiconductor material preparation. The reactor assembly comprises: the reaction chamber comprises a raw material chamber and a waste material chamber, and the bottom end of the waste material chamber is lower than that of the raw material chamber; the heating mechanism is sleeved outside the raw material cavity and used for heating the raw material cavity; the crystal growth cavity is communicated with the raw material cavity through a gas phase transmission channel, and raw material gas generated by sublimation of raw materials in the raw material cavity is transmitted to seed crystals in the crystal growth cavity through the gas phase transmission channel for crystal growth; and the plug flow mechanism moves the waste materials generated in the crystal growth process in the raw material cavity to the waste material cavity. This reactor component can in time remove the waste material to the waste material chamber, improves the sublimation rate and the utilization ratio of raw materials to reduce the defect of crystal. |
| priorityDate | 2021-04-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9863 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549006 |
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