http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113732936-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-015 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-015 |
| filingDate | 2021-10-26^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-07-15^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-07-15^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-113732936-B |
| titleOfInvention | A polishing temperature control device, chemical mechanical polishing system and method |
| abstract | The invention discloses a polishing temperature control device, a chemical mechanical polishing system and a method. The polishing temperature control device includes a first temperature adjustment mechanism, which includes a heat transfer roller, a mounting seat and a driving seat, and the driving seat is arranged on the polishing The machine platen of the equipment, the mounting seat is arranged on the driving seat, the heat transfer roller is cantilevered on one side of the driving seat, the outer peripheral side of the heat transfer roller is in contact with the upper side of the polishing pad, and the rotating polishing The pad drives the heat transfer roller to rotate around its axis to control the temperature of the polishing pad and the polishing liquid; the second temperature regulating mechanism is arranged in the wafer transport path to spray fluid on the passing wafer to control the temperature of the bottom surface of the wafer. |
| priorityDate | 2021-05-08^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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