| abstract |
The invention discloses a preparation method of a spiral inductor, the spiral inductor and a passive device module, wherein the method comprises the following steps: providing a substrate; growing an epitaxial layer on the surface of the substrate, and depositing a first dielectric layer on the surface of the epitaxial layer; forming a first metal layer, a second dielectric layer, a second metal layer and a passivation layer on the first dielectric layer from bottom to top in sequence; and preparing a spiral inductance slot line with a preset slot shape in the first metal layer and the second metal layer. The invention can solve the technical problems of large integration area, small inductance value and the like in the manufacture of the inductor in the prior art. |