| abstract |
The present invention relates to yttrium-based particles for thermal spraying, a method for preparing the same, and a thermal spraying film, and more specifically, it is contained in Y 2 O 3 , YOF, YF 3 , Y 4 Al 2 O 9 , Y 3 Al 5 O 12 and One or more yttrium compound powders and silica powders selected from YAlO 3 , prepared by mixing yttrium compound powders with an average diameter of 50 to 900 nm and silica powders with an average diameter of 50 to 900 nm, including a Y-Si-O mesophase If it is less than 10% by weight, the thermal spray coating prepared by using it has a low porosity, forms a very dense thin film, and is excellent in plasma resistance. |