http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114046452-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f34e7a7ed214b955dce39566f41440bd |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16L11-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-107 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16L11-081 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17D1-13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B60P3-2215 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B60P3-225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B60P3-2265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17D1-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D35-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B60P3-228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17D3-01 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D35-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-107 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B60P3-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17D1-13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16L11-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17D1-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17D3-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16L11-08 |
filingDate | 2021-11-25^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b79f51fa6a2ad38686e11cceb1cf93b3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fce298ec9dd030b8208fc6f04dcd3df http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62a740085cfd069a2b6a41e183fc6bdc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e54f964554343a95c26893ae9bed3883 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_404aa7c126bb30004a1e73b52ad21ff9 |
publicationDate | 2022-02-15^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-114046452-A |
titleOfInvention | Recovery system after liquid chlorosilane leaks |
abstract | The invention relates to the technical field of polysilicon production equipment, in particular to a recovery system for leaked liquid chlorosilane, which comprises a pneumatic diaphragm metering pump, a collecting tank, a liquid transfer pump and an accident tank, wherein the pneumatic diaphragm metering pump is connected with the collecting tank; a liquid inlet of the pneumatic diaphragm metering pump is connected with a first liquid conveying pipeline; a filter screen is arranged at the inlet of the first infusion pipeline; the upper part of the collecting tank is provided with a first liquid inlet; the first liquid inlet is communicated with a liquid outlet of the pneumatic diaphragm metering pump through a second liquid conveying pipeline; the upper part of the collecting tank is provided with a second liquid inlet; the liquid inlet II is communicated with the waste gas pipe network through a liquid conveying pipeline III; the upper part of the collecting tank is provided with a nitrogen input port; the lower part of the collecting tank is provided with an output port; a liquid inlet of the liquid transferring pump is communicated with an output port through a fourth liquid transferring pipeline; a nitrogen pipe is connected to the fourth infusion pipeline; a liquid outlet of the liquid transferring pump is connected with a fifth liquid conveying pipeline; the accident tank is connected with the output end of the infusion pipeline five through the infusion pipeline six. The invention can reduce material waste and environmental pollution. |
priorityDate | 2021-11-25^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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