http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114046452-A

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filingDate 2021-11-25^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b79f51fa6a2ad38686e11cceb1cf93b3
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publicationDate 2022-02-15^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-114046452-A
titleOfInvention Recovery system after liquid chlorosilane leaks
abstract The invention relates to the technical field of polysilicon production equipment, in particular to a recovery system for leaked liquid chlorosilane, which comprises a pneumatic diaphragm metering pump, a collecting tank, a liquid transfer pump and an accident tank, wherein the pneumatic diaphragm metering pump is connected with the collecting tank; a liquid inlet of the pneumatic diaphragm metering pump is connected with a first liquid conveying pipeline; a filter screen is arranged at the inlet of the first infusion pipeline; the upper part of the collecting tank is provided with a first liquid inlet; the first liquid inlet is communicated with a liquid outlet of the pneumatic diaphragm metering pump through a second liquid conveying pipeline; the upper part of the collecting tank is provided with a second liquid inlet; the liquid inlet II is communicated with the waste gas pipe network through a liquid conveying pipeline III; the upper part of the collecting tank is provided with a nitrogen input port; the lower part of the collecting tank is provided with an output port; a liquid inlet of the liquid transferring pump is communicated with an output port through a fourth liquid transferring pipeline; a nitrogen pipe is connected to the fourth infusion pipeline; a liquid outlet of the liquid transferring pump is connected with a fifth liquid conveying pipeline; the accident tank is connected with the output end of the infusion pipeline five through the infusion pipeline six. The invention can reduce material waste and environmental pollution.
priorityDate 2021-11-25^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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