http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114323396-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L5-165 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 |
| filingDate | 2021-12-23^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-11-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-11-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114323396-B |
| titleOfInvention | A MEMS capacitive six-axis force sensor chip and its fabrication process |
| abstract | A MEMS capacitive six-axis force sensor chip and a preparation process thereof. The chip includes a high-resistance silicon device layer, a low-resistance silicon device layer and a glass device layer arranged from top to bottom. A sandwich structure is formed; the high-resistance silicon device layer includes a first central rigid body and a load transfer structure; the low-resistance silicon device layer includes a second central rigid body, the periphery of the second central rigid body and the electrodes form comb capacitors, and the second central rigid body On the one hand, it is integrated with the first central rigid body, and on the other hand, it is used as the common electrode of the comb-tooth capacitor moving plate; the glass device layer includes a glass substrate, and flat capacitor plates, external pads, internal pads, Metal layer structures such as metal leads; the preparation process includes the processing technology of the silicon device layer, the processing technology of the glass device layer, the silicon-glass bonding process and the dicing; the present invention realizes the decoupling output of six-axis force or torque, and has a large range , high sensitivity, small crosstalk error, miniaturization and other advantages. |
| priorityDate | 2021-12-23^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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