| abstract |
The invention relates to a safe and reliable ultra-pure disilane gas filling equipment, comprising an integrated air intake cabinet, the integrated air intake cabinet includes a pre-cooling cabinet and a negative pressure valve box, and a plurality of filling steel cylinders are arranged in the pre-cooling cabinet. The bottle body is set in the pre-cooling cabinet, the bottle head on the filling steel cylinder is connected with the main filling pipeline through the filling joint, and the main filling pipeline is respectively connected with the first filling branch, the second filling branch, The third filling branch, the fourth filling branch, the fifth filling branch and the sixth filling branch are connected. The present invention improves the functionality and work efficiency of the filling operation by integrating the air intake cabinet and the structural arrangement of several filling steel cylinders. |