http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10065663-A1

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filingDate 2000-12-29^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ad3b4e2a986f141fb003282e4779470
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publicationDate 2002-07-11^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-10065663-A1
titleOfInvention Semiconductor circuit arrangement and method for the production thereof
abstract In order to better suppress oxidation processes in contact areas (16) between a semiconductor substrate (18) and the contact elements (14) provided, it is proposed that diffusion barriers (15) provided in semiconductor circuit arrangements (1) be provided for shielding in addition to the chemical and / or physical absorption of atmospheric constituents, in order to to reduce their diffusion along interfaces (15k) of the barrier area (15) in the direction of the respective contact area (16).
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