http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102005040789-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0109 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00301 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C99-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B1-00 |
| filingDate | 2005-08-29^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9fda7090e39fd729f337719d3ab6cc30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa38a158a4a13094fda16d21699b2bc4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb0034d5a0fefe3fe21ad5837d7c9b20 |
| publicationDate | 2007-03-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102005040789-A1 |
| titleOfInvention | Micromechanical device with anodically bonded cap and manufacturing process |
| abstract | The invention is based on a micromechanical component with a cap wafer at least consisting of a first silicon substrate (1) and a thin glass substrate (2), with a functional wafer at least consisting of a second silicon substrate (5), with at least one electrical contact surface (5) on the functional wafer. 6) is arranged. The cap wafer is connected to the functional wafer on the glass substrate (2) by anodic bonding. The essence of the invention is that the electrical contact surface (6) is arranged on a side of the functional wafer facing the cap wafer and the cap wafer has at least one recess such that access (9) is provided to the electrical contact surface (6). The invention further relates to a method for encapsulating a micromechanical component with a cap wafer by anodic bonding of the cap wafer to a functional wafer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102009045541-B4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11130672-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019030040-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102017213631-A1 |
| priorityDate | 2005-08-29^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
Showing number of triples: 1 to 22 of 22.