| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12361 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61K9-0009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61P35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61P9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61K9-501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61K9-5089 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61K9-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J13-02 |
| filingDate |
2006-06-23^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8b3bf648b01ac584719d1e8fdbf68e1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5ef2ba8bd5816e43479bd2bce8a518f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbda43f4b0fb77f16dccea87f8d39b0e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af40590ddfef4c49f1920e5cf4582328
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72f7cb6cc900b0906ecfc12aaa510dc0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_304fc3848d9276d182394fd01feeb23e |
| publicationDate |
2007-12-27^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102006028915-A1 |
| titleOfInvention |
Method for producing an at least partially porous silicon hollow body, hollow hollow bodies which can be produced thereby and their use |
| abstract |
ThenThe invention relates to a method for producing at least onenpartially porousnSilicon hollow body,ncomprising the steps of vertical anisotropic etching, porosification and electropolishing.nThe invention further relates to hollow silicon body produced thereby, whereinnthe body wallnan inner layer, an intermediate layer and an outer layernincludes and where the porositynthe intermediate layer is larger than that of the inner andnthe outer layer is.nadditionallynThe invention relates to the use of the hollow silicon body. |
| priorityDate |
2006-06-23^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |