abstract |
Inna vacuum pumping device into which a process gas (38), the reactivenParticles (40) can be sucked in, is controlled by an oxygen inletn(26, 26a, 26b) oxygen in the form of air or pure oxygennfed.nThis results in the compression chamber (24) a controllednOxidation, so the dustsnin case of a suddennventilationndo not ignitencan. |