| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76882 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02697
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28506
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-743
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00 |
| filingDate |
2013-08-27^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c3de983880e8573877fda6086e89fad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae7872e9f824803a1e3f09933140501f |
| publicationDate |
2014-03-06^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102013109285-A1 |
| titleOfInvention |
Method for producing a layer arrangement, and layer arrangement |
| abstract |
A method (100) of fabricating a stacked layer according to various embodiments may include: providing a first layer having a side (102); Forming one or more nanoholes in the first layer, which are open toward the side of the first layer (104); and depositing a second layer over the side of the first layer (106). |
| priorityDate |
2012-08-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |