http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102015216775-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa0f2776bcc27d5099aa97f3212e1681 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-364 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0676 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-402 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-0622 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78 |
| filingDate | 2015-09-02^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03a7e73307d69f3db1c15ea60d84f8cb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ac053408241ce2d3d0249d4ca26ace8 |
| publicationDate | 2016-03-10^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102015216775-A1 |
| titleOfInvention | Laser processing device |
| abstract | Herein, a laser processing apparatus is disclosed. A laser beam irradiation unit of the laser processing apparatus includes: a pulse laser oscillator configured to oscillate a pulsed laser beam at a predetermined repetition frequency; a first and a second condenser configured to collect the pulsed laser beam oscillated by the pulse laser oscillator; and a beam splitter unit disposed between the pulse laser oscillator and the first and second condensers for splitting the pulsed laser beam oscillated by the pulse laser oscillator and directing the resulting beams alternately toward the first and second condensers. The beam splitting unit includes a photoelastic modulator having a piezoelectric element and a synthetic quartz formed in one piece and modulating the laser beam so that a plane of polarization of the laser beam is alternately at 0 and 90 degrees by applying a high frequency voltage to the piezoelectric element Frequency is applied, which coincides with the natural frequency of the synthetic quartz. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112719611-A |
| priorityDate | 2014-09-04^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758 |
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