| abstract |
A method is proposed for producing a micromechanical component with a substrate and with a cap connected to the substrate and enclosing a first cavity with the substrate, a first pressure prevailing in the first cavern and a first gas mixture having a first chemical composition being enclosed wherein the cap encloses a second cavity with the substrate, wherein in the second cavity there is a second pressure and a second gas mixture is included with a second chemical composition, wherein In a first method step, an access opening connecting the first cavity to an environment of the micromechanical component is formed in the substrate or in the cap, wherein - In a second process step, the first pressure and / or the first chemical composition in the first cavity is set, wherein - In a third step, the access opening is closed by introducing energy or heat into an absorbent part of the substrate or the cap by means of a laser, wherein In a fourth method step, a recess arranged essentially between the first cavern and the second cavern for deriving at least one first particle type of the first gas mixture and / or at least one second particle type of the second gas mixture is formed. |