| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a8ace3886ad985680695e66f92b53552 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q80-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2067 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q40-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q30-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-30 |
| filingDate |
2020-07-09^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca662570197e0b6f9c238128cc25f70c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2dbfa9a498c5155d2ae3cd262817d807 |
| publicationDate |
2022-01-13^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102020118150-A1 |
| titleOfInvention |
Method, test structure, test device and device |
| abstract |
A method for determining a geometry of a measuring tip (100) for a scanning probe microscope is proposed. The procedure includes the steps: a) Generating (S1) at least one test structure (200) which has elevations (210) alternating with depressions (220) in a first direction (I), the elevations (210) and depressions (220) being parallel to one another in a second direction (II) perpendicular to the first direction (I); b) scanning (S2) of the test structure (200) with the measuring tip (100) to determine a profile (300) of the test structure (200); and c) Determining (S3) the geometry of the measuring tip (100) as a function of the determined profile (300). |
| priorityDate |
2020-07-09^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |