| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26586
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B20-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B20-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-112 |
| filingDate |
1997-09-25^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-07-06^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75d46f59d62099a40a506e5c48d5e2b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69d979485eb428984f2fccba1d191792
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed402fccce59fecdc45b87386f66eb98
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb7a5ffcd6090e92880dbb7fb6301f5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ed28b08721748877a825920fd4802ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6fae9de8bc5cc20bcd3df809e1d4f9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c933a7aacaf761647f26a872ad642f28 |
| publicationDate |
2000-07-06^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-19742397-C2 |
| titleOfInvention |
Method for producing a semiconductor structure with a plurality of trenches |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102007030755-B3 |
| priorityDate |
1997-09-25^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |