| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-911
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-117
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-321 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 |
| filingDate |
1980-11-25^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d0bb7703bb1f048b27d3f96e508d44b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83d5a38cc63fba2d2a7c456790995922
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93f60b5d8d935456c6ed2fcaa6f6a055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ed52690b177e6351fde15514827e753
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c1f08b1b616994d2751a92dc59d2937 |
| publicationDate |
1981-06-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-3044388-A1 |
| titleOfInvention |
METHOD FOR PRODUCING SEMICONDUCTOR DEVICES |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4897368-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-3600545-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2524709-A1 |
| priorityDate |
1979-11-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |