| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_550e2b1dd91bda5627e757f638aeff85 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01C17-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01C7-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01C7-041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K7-223 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01C7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01C7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01C17-12 |
| filingDate |
1982-03-05^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40e07c30eedbd4f8e4d3753a8d9b4ba7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db5e35eb51b1a73b4a5b7b0dc69ae3c9 |
| publicationDate |
1983-09-08^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-3207979-A1 |
| titleOfInvention |
THICK-LAYER RESISTANCE THERMOMETER |
| abstract |
As a base, a thin-film resistance thermometer has a substrate having at least one electrically nonconducting surface on which a thin-film semiconductor resistance element is situated between two metal contacts. The sensitivity of such a resistance thermometer can be appreciably improved by making it of TaOxNy, where x and y fulfil the requirement that x >/= 2-2y and by covering the resistance element with a protective layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104025211-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104025211-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2822001-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10942070-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9852829-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2822002-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2822001-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2822002-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9905341-B2 |
| priorityDate |
1982-03-05^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |